Hot zone parameters

Effective heating zone size

Φ150×240（H）mm

Max. Loading capacity

20 Kg (Tooling and rack are included)

Temperature parameters

Max. Temperature 

1300℃

Operation temperature 

550℃~1250℃

Temperature uniformity

≤±5℃, Tested at 550℃, 800℃, 1050℃ 

Temperature control accuracy

≤±1.0℃

Heating power 

30Kw

Heating speed 

0~25℃/min（adjustable, without loading） 

Vacuum parameters

Ultimate vacuum 

≤6×10-4 Pa

Testing in the condition of baked-out, degassed, unloading and cold state

Working vacuum 

≤6×10-3 Pa

Pressure rising rate 

≤0.65Pa/h after bake-out

Range of partial pressure 

10Pa to 500Pa

Pumping speed 

Less than 30 mins from 105Pa to 6×10-3 Pa